Based on the development of differentiated platform as competitive strategy, coupled with government policies of subsidies, most of the foundry industry has gradually give up the struggle with the first foundry industry in nanoscale advanced process, turned toward the special process with MEMS process R & D investment . Foundries including SMIC, Shanghai advanced, Grace, CSMC China have put into the research and development of MEMS products through strategic cooperation with the semiconductor plant. Core MEMS process research and development in its infancy, there is no lock any MEMS products; Grace also entered the field of MEMS, taking into account the main tire pressure sensing; CSMC find partners, starting in 2011, that product, 2012 to tire pressure sensors, MEMS infrared sensors, accelerometers, gravity sensor, 2-axis and 3-axis MEMS gyroscope, 3-axis accelerometer and other products will be launched in 2014. Shanghai advanced invests in the development of MEMS technology, long-term strategic cooperation with semiconductor manufacturers, they accept small orders in 2012, launching the 3-axis gyroscope, tire pressure sensors in future.